# Microstructure analysis of epitaxial BaTiO3 thin films on SrTiO3-buffered Si: Strain and dislocation density quantification using HRXRD methods

> Research article (Materialia, 2020) · cited 27× · AI/ML

**Wikidata**: [openalex:W3101673862](https://www.wikidata.org/wiki/openalex:W3101673862)  
**Source**: https://4ort.xyz/entity/microstructure-analysis-of-epitaxial-batio3-thin-films-on-srtio3-buffered-si-strain-and-dislocation-density-quantificati