# Microsphere-assisted hyperspectral imaging: super-resolution, non-destructive metrology for semiconductor devices

> Research article (Light Science & Applications, 2024) · cited 22× · AI/ML

**Wikidata**: [openalex:W4399087760](https://www.wikidata.org/wiki/openalex:W4399087760)  
**Source**: https://4ort.xyz/entity/microsphere-assisted-hyperspectral-imaging-super-resolution-non-destructive-metrology-for-semiconductor-devices