# Microfabrication Technology for Large Lekid Arrays: From Nika2 to Future Applications

> Research article (Journal of Low Temperature Physics, 2016) · cited 19× · AI/ML

**Wikidata**: [openalex:W2952046877](https://www.wikidata.org/wiki/openalex:W2952046877)  
**Source**: https://4ort.xyz/entity/microfabrication-technology-for-large-lekid-arrays-from-nika2-to-future-applications