# Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope

> Research article (Micromachines, 2020) · cited 18× · AI/ML

**Wikidata**: [openalex:W3085022181](https://www.wikidata.org/wiki/openalex:W3085022181)  
**Source**: https://4ort.xyz/entity/microfabrication-process-driven-design-fem-analysis-and-system-modeling-of-3-dof-drive-mode-and-2-dof-sense-mode-thermal