# Micro-motion detection of the 3-DOF precision positioning stage based on iterative optimized template matching

> Research article (Applied Optics, 2017) · cited 16× · AI/ML

**Wikidata**: [openalex:W2770317182](https://www.wikidata.org/wiki/openalex:W2770317182)  
**Source**: https://4ort.xyz/entity/micro-motion-detection-of-the-3-dof-precision-positioning-stage-based-on-iterative-optimized-template-matching