# micro-electromechanical systems

> technology of very small devices

**Wikidata**: [Q175561](https://www.wikidata.org/wiki/Q175561)  
**Wikipedia**: [English](https://en.wikipedia.org/wiki/MEMS)  
**Source**: https://4ort.xyz/entity/micro-electromechanical-systems


## References

1. Integrated Authority File
2. [Nuovo soggettario](https://thes.bncf.firenze.sbn.it/termine.php?id=60428)
3. Freebase Data Dumps. 2013
4. [Source](https://www.abs.gov.au/AUSSTATS/abs@.nsf/DetailsPage/1297.02008?OpenDocument)
5. National Library of Israel
6. [Source](https://www.abs.gov.au/statistics/classifications/australian-and-new-zealand-standard-research-classification-anzsrc/2020#data-downloads)
7. [OpenAlex](https://docs.openalex.org/download-snapshot/snapshot-data-format)