# Metrology of DSA process using TEM tomography

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2015) · cited 11× · AI/ML

**Wikidata**: [openalex:W2018178406](https://www.wikidata.org/wiki/openalex:W2018178406)  
**Source**: https://4ort.xyz/entity/metrology-of-dsa-process-using-tem-tomography