# Metrics for stochastic scaling in EUV lithography

> Research article (International Conference on Extreme Ultraviolet Lithography 2019, 2019) · cited 10× · AI/ML

**Wikidata**: [openalex:W2980664406](https://www.wikidata.org/wiki/openalex:W2980664406)  
**Source**: https://4ort.xyz/entity/metrics-for-stochastic-scaling-in-euv-lithography