# MEMS-mirror based trajectory resolution and precision enabled by two different piezoresistive sensor technologies

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2016) · cited 19× · AI/ML

**Wikidata**: [openalex:W2299021334](https://www.wikidata.org/wiki/openalex:W2299021334)  
**Source**: https://4ort.xyz/entity/mems-mirror-based-trajectory-resolution-and-precision-enabled-by-two-different-piezoresistive-sensor-technologies