# MEMS-Enabled On-Chip Computational Mid-Infrared Spectrometer Using Silicon Photonics

> Research article (ACS Photonics, 2022) · cited 81× · AI/ML

**Wikidata**: [openalex:W4283332692](https://www.wikidata.org/wiki/openalex:W4283332692)  
**Source**: https://4ort.xyz/entity/mems-enabled-on-chip-computational-mid-infrared-spectrometer-using-silicon-photonics