# Mechanism of mid-spatial-frequency waviness removal by viscoelastic polishing tool

> Research article (CIRP Annals, 2022) · cited 15× · AI/ML

**Wikidata**: [openalex:W4280500706](https://www.wikidata.org/wiki/openalex:W4280500706)  
**Source**: https://4ort.xyz/entity/mechanism-of-mid-spatial-frequency-waviness-removal-by-viscoelastic-polishing-tool