# Measuring the Quality Factor in MEMS Devices

> Research article (Micromachines, 2015) · cited 11× · AI/ML

**Wikidata**: [openalex:W2195482241](https://www.wikidata.org/wiki/openalex:W2195482241)  
**Source**: https://4ort.xyz/entity/measuring-the-quality-factor-in-mems-devices