# Measuring after etch overlay and characterizing tilt fingerprints in multi-tier 3D-NAND structures

> Research article (Metrology, Inspection, and Process Control for Microlithography XXXIII, 2019) · cited 11× · AI/ML

**Wikidata**: [openalex:W2924671094](https://www.wikidata.org/wiki/openalex:W2924671094)  
**Source**: https://4ort.xyz/entity/measuring-after-etch-overlay-and-characterizing-tilt-fingerprints-in-multi-tier-3d-nand-structures