# Material removal rate prediction in chemical mechanical planarization with conditional probabilistic autoencoder and stacking ensemble learning

> Research article (Journal of Intelligent Manufacturing, 2022) · cited 25× · AI/ML

**Wikidata**: [openalex:W4306249557](https://www.wikidata.org/wiki/openalex:W4306249557)  
**Source**: https://4ort.xyz/entity/material-removal-rate-prediction-in-chemical-mechanical-planarization-with-conditional-probabilistic-autoencoder-and-sta