# Material Removal Rate Prediction for Sapphire Double-Sided CMP Based on RSM-SVM

> Research article (ECS Journal of Solid State Science and Technology, 2022) · cited 14× · AI/ML

**Wikidata**: [openalex:W4286615367](https://www.wikidata.org/wiki/openalex:W4286615367)  
**Source**: https://4ort.xyz/entity/material-removal-rate-prediction-for-sapphire-double-sided-cmp-based-on-rsm-svm