# Maskless lithography based on oblique scanning of point array with digital distortion correction

> Research article (Optics and Lasers in Engineering, 2020) · cited 25× · AI/ML

**Wikidata**: [openalex:W3046626135](https://www.wikidata.org/wiki/openalex:W3046626135)  
**Source**: https://4ort.xyz/entity/maskless-lithography-based-on-oblique-scanning-of-point-array-with-digital-distortion-correction