# Mask is key to unlock full EUVL potential

> Research article (Extreme Ultraviolet (EUV) Lithography XII, 2021) · cited 13× · AI/ML

**Wikidata**: [openalex:W3132444576](https://www.wikidata.org/wiki/openalex:W3132444576)  
**Source**: https://4ort.xyz/entity/mask-is-key-to-unlock-full-euvl-potential