# Mask Based Lithography for Fast, Large Scale Pattern Generation with Nanometer Resolution
**Wikidata**: [eu_cordis:863127](https://www.wikidata.org/wiki/eu_cordis:863127)  
**Source**: https://4ort.xyz/entity/mask-based-lithography-for-fast-large-scale-pattern-generation-with-nanometer-resolution


## References

1. Source