# Maintenance of virtual metrology models

> Research article (2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC), 2016) · cited 12× · AI/ML

**Wikidata**: [openalex:W2424489674](https://www.wikidata.org/wiki/openalex:W2424489674)  
**Source**: https://4ort.xyz/entity/maintenance-of-virtual-metrology-models