# Machine Learning (ML)-Based Model to Characterize the Line Edge Roughness (LER)-Induced Random Variation in FinFET

> Research article (IEEE Access, 2020) · cited 26× · AI/ML

**Wikidata**: [openalex:W3082043105](https://www.wikidata.org/wiki/openalex:W3082043105)  
**Source**: https://4ort.xyz/entity/machine-learning-ml-based-model-to-characterize-the-line-edge-roughness-ler-induced-random-variation-in-finfet