# Machine learning (ML)-based lithography optimizations

> Research article (2016 IEEE Asia Pacific Conference on Circuits and Systems (APCCAS), 2016) · cited 14× · AI/ML

**Wikidata**: [openalex:W2574590896](https://www.wikidata.org/wiki/openalex:W2574590896)  
**Source**: https://4ort.xyz/entity/machine-learning-ml-based-lithography-optimizations