# Machine Learning-Guided Etch Proximity Correction

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2016) · cited 12× · AI/ML

**Wikidata**: [openalex:W2554356216](https://www.wikidata.org/wiki/openalex:W2554356216)  
**Source**: https://4ort.xyz/entity/machine-learning-guided-etch-proximity-correction