# Machine learning for mask/wafer hotspot detection and mask synthesis

> Research article (Photomask Technology, 2017) · cited 23× · AI/ML

**Wikidata**: [openalex:W2765930152](https://www.wikidata.org/wiki/openalex:W2765930152)  
**Source**: https://4ort.xyz/entity/machine-learning-for-mask-wafer-hotspot-detection-and-mask-synthesis