# Machine learning based wafer defect detection

> Research article (Design-Process-Technology Co-optimization for Manufacturability XIII, 2019) · cited 14× · AI/ML

**Wikidata**: [openalex:W2920942731](https://www.wikidata.org/wiki/openalex:W2920942731)  
**Source**: https://4ort.xyz/entity/machine-learning-based-wafer-defect-detection