# Machine learning-based run-to-run control of a spatial thermal atomic layer etching reactor

> Research article (Computers & Chemical Engineering, 2022) · cited 17× · AI/ML

**Wikidata**: [openalex:W4307725386](https://www.wikidata.org/wiki/openalex:W4307725386)  
**Source**: https://4ort.xyz/entity/machine-learning-based-run-to-run-control-of-a-spatial-thermal-atomic-layer-etching-reactor