# Machine Learning-Based Process-Level Fault Detection and Part-Level Fault Classification in Semiconductor Etch Equipment

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2022) · cited 42× · AI/ML

**Wikidata**: [openalex:W4220992948](https://www.wikidata.org/wiki/openalex:W4220992948)  
**Source**: https://4ort.xyz/entity/machine-learning-based-process-level-fault-detection-and-part-level-fault-classification-in-semiconductor-etch-equipment