# Machine learning-based modeling and operation for ALD of SiO2 thin-films using data from a multiscale CFD simulation

> Research article (Process Safety and Environmental Protection, 2019) · cited 61× · AI/ML

**Wikidata**: [openalex:W2972796812](https://www.wikidata.org/wiki/openalex:W2972796812)  
**Source**: https://4ort.xyz/entity/machine-learning-based-modeling-and-operation-for-ald-of-sio2-thin-films-using-data-from-a-multiscale-cfd-simulation