# Machine learning and atomic layer deposition: Predicting saturation times from reactor growth profiles using artificial neural networks

> Research article (Journal of Vacuum Science & Technology A Vacuum Surfaces and Films, 2022) · cited 13× · AI/ML

**Wikidata**: [openalex:W4308478172](https://www.wikidata.org/wiki/openalex:W4308478172)  
**Source**: https://4ort.xyz/entity/machine-learning-and-atomic-layer-deposition-predicting-saturation-times-from-reactor-growth-profiles-using-artificial-n