# Low-noise AlN-on-Si resonant infrared detectors using a commercial foundry MEMS fabrication process

> Research article (2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2015) · cited 13× · AI/ML

**Wikidata**: [openalex:W2117898827](https://www.wikidata.org/wiki/openalex:W2117898827)  
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