# Low-Frequency Noise Assessment of Work Function Engineering Cap Layers in High-k Gate Stacks

> Research article (ECS Journal of Solid State Science and Technology, 2019) · cited 13× · AI/ML

**Wikidata**: [openalex:W2918861294](https://www.wikidata.org/wiki/openalex:W2918861294)  
**Source**: https://4ort.xyz/entity/low-frequency-noise-assessment-of-work-function-engineering-cap-layers-in-high-k-gate-stacks