# Low-Energy Pulsed Ion Beam Technology with Ultra-High Material Removal Resolution and Widely Adjustable Removal Efficiency

> Research article (Micromachines, 2021) · cited 13× · AI/ML

**Wikidata**: [openalex:W3212536188](https://www.wikidata.org/wiki/openalex:W3212536188)  
**Source**: https://4ort.xyz/entity/low-energy-pulsed-ion-beam-technology-with-ultra-high-material-removal-resolution-and-widely-adjustable-removal-efficien