# Low-Cost Lithography Hotspot Detection with Active Entropy Sampling and Model Calibration

> Research article (2021 58th ACM/IEEE Design Automation Conference (DAC), 2021) · cited 11× · AI/ML

**Wikidata**: [openalex:W3214178105](https://www.wikidata.org/wiki/openalex:W3214178105)  
**Source**: https://4ort.xyz/entity/low-cost-lithography-hotspot-detection-with-active-entropy-sampling-and-model-calibration