# Locally Adaptive Statistical Background Modeling With Deep Learning-Based False Positive Rejection for Defect Detection in Semiconductor Units

> Research article (IEEE Transactions on Semiconductor Manufacturing, 2020) · cited 14× · AI/ML

**Wikidata**: [openalex:W3028889152](https://www.wikidata.org/wiki/openalex:W3028889152)  
**Source**: https://4ort.xyz/entity/locally-adaptive-statistical-background-modeling-with-deep-learning-based-false-positive-rejection-for-defect-detection-