# LithoPW: Leveraging Visual Memory Encoding and Defect-Aware Optimization for Precise Determination of the Lithography Process Windows

> Research article (IEEE Transactions on Circuits and Systems for Video Technology, 2024) · cited 11× · AI/ML

**Wikidata**: [openalex:W4396506033](https://www.wikidata.org/wiki/openalex:W4396506033)  
**Source**: https://4ort.xyz/entity/lithopw-leveraging-visual-memory-encoding-and-defect-aware-optimization-for-precise-determination-of-the-lithography-pro