# Lithography Hotspots Detection Using Deep Learning

> Research article (2018 15th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design (SMACD), 2018) · cited 23× · AI/ML

**Wikidata**: [openalex:W2887033034](https://www.wikidata.org/wiki/openalex:W2887033034)  
**Source**: https://4ort.xyz/entity/lithography-hotspots-detection-using-deep-learning