# Lithography Hotspot Detection Based on Heterogeneous Federated Learning With Local Adaptation and Feature Selection

> Research article (IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 2023) · cited 11× · AI/ML

**Wikidata**: [openalex:W4388692453](https://www.wikidata.org/wiki/openalex:W4388692453)  
**Source**: https://4ort.xyz/entity/lithography-hotspot-detection-based-on-heterogeneous-federated-learning-with-local-adaptation-and-feature-selection
