# Lithographic source optimization based on adaptive projection compressive sensing

> Research article (Optics Express, 2017) · cited 40× · AI/ML

**Wikidata**: [openalex:W2595155430](https://www.wikidata.org/wiki/openalex:W2595155430)  
**Source**: https://4ort.xyz/entity/lithographic-source-optimization-based-on-adaptive-projection-compressive-sensing