# Lithographic resolution enhancement of a maskless lithography system based on a wobulation technique for flow lithography

> Research article (Applied Physics Letters, 2016) · cited 43× · AI/ML

**Wikidata**: [openalex:W2560595669](https://www.wikidata.org/wiki/openalex:W2560595669)  
**Source**: https://4ort.xyz/entity/lithographic-resolution-enhancement-of-a-maskless-lithography-system-based-on-a-wobulation-technique-for-flow-lithograph
