# Lithographic imaging-driven pattern edge placement errors at the 10-nm node

> Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2016) · cited 12× · AI/ML

**Wikidata**: [openalex:W2315462354](https://www.wikidata.org/wiki/openalex:W2315462354)  
**Source**: https://4ort.xyz/entity/lithographic-imaging-driven-pattern-edge-placement-errors-at-the-10-nm-node