# Litho-Aware Machine Learning for Hotspot Detection

> Research article (IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 2017) · cited 24× · AI/ML

**Wikidata**: [openalex:W2751355844](https://www.wikidata.org/wiki/openalex:W2751355844)  
**Source**: https://4ort.xyz/entity/litho-aware-machine-learning-for-hotspot-detection