# Linearized control of an uniaxial micromirror with electrostatic parallel-plate actuation

> Research article (Microsystem Technologies, 2015) · cited 11× · AI/ML

**Wikidata**: [openalex:W2050968026](https://www.wikidata.org/wiki/openalex:W2050968026)  
**Source**: https://4ort.xyz/entity/linearized-control-of-an-uniaxial-micromirror-with-electrostatic-parallel-plate-actuation
