# Linear and nonlinear free vibrations of electrostatically actuated micro-/nanomechanical resonators

> Research article (Microsystem Technologies, 2015) · cited 10× · AI/ML

**Wikidata**: [openalex:W2286967357](https://www.wikidata.org/wiki/openalex:W2286967357)  
**Source**: https://4ort.xyz/entity/linear-and-nonlinear-free-vibrations-of-electrostatically-actuated-micro-nanomechanical-resonators