# Line-edge roughness performance targets for EUV lithography

> Research article (Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE, 2017) · cited 30× · AI/ML

**Wikidata**: [openalex:W2599326103](https://www.wikidata.org/wiki/openalex:W2599326103)  
**Source**: https://4ort.xyz/entity/line-edge-roughness-performance-targets-for-euv-lithography