# Line edge roughness metrology: recent challenges and advances toward more complete and accurate measurements

> Research article (Journal of Micro/Nanolithography MEMS and MOEMS, 2018) · cited 10× · AI/ML

**Wikidata**: [openalex:W2912511326](https://www.wikidata.org/wiki/openalex:W2912511326)  
**Source**: https://4ort.xyz/entity/line-edge-roughness-metrology-recent-challenges-and-advances-toward-more-complete-and-accurate-measurements