# Lens-free reflective topography for high-resolution wafer inspection

> Research article (Scientific Reports, 2024) · cited 14× · AI/ML

**Wikidata**: [openalex:W4396743201](https://www.wikidata.org/wiki/openalex:W4396743201)  
**Source**: https://4ort.xyz/entity/lens-free-reflective-topography-for-high-resolution-wafer-inspection