# Learning Control for Motion Coordination in Wafer Scanners: Toward Gain Adaptation

> Research article (IEEE Transactions on Industrial Electronics, 2022) · cited 95× · AI/ML

**Wikidata**: [openalex:W4206951632](https://www.wikidata.org/wiki/openalex:W4206951632)  
**Source**: https://4ort.xyz/entity/learning-control-for-motion-coordination-in-wafer-scanners-toward-gain-adaptation