# Large Scale Uniformity of Sputtering Deposited Single- and Few-Layer MoS<sub>2</sub>Investigated by XPS Multipoint Measurements and Histogram Analysis of Optical Contrast

> Research article (ECS Journal of Solid State Science and Technology, 2016) · cited 14× · AI/ML

**Wikidata**: [openalex:W2471512370](https://www.wikidata.org/wiki/openalex:W2471512370)  
**Source**: https://4ort.xyz/entity/large-scale-uniformity-of-sputtering-deposited-single-and-few-layer-mos-sub-2-sub-investigated-by-xps-multipoint-measure