# Large area high-speed metrology SPM system

> Research article (Nanotechnology, 2015) · cited 35× · AI/ML

**Wikidata**: [openalex:W2155726193](https://www.wikidata.org/wiki/openalex:W2155726193)  
**Source**: https://4ort.xyz/entity/large-area-high-speed-metrology-spm-system