# Label-free neural networks-based inverse lithography technology

> Research article (Optics Express, 2022) · cited 21× · AI/ML

**Wikidata**: [openalex:W4309170237](https://www.wikidata.org/wiki/openalex:W4309170237)  
**Source**: https://4ort.xyz/entity/label-free-neural-networks-based-inverse-lithography-technology