# L2O-ILT: Learning to Optimize Inverse Lithography Techniques

> Research article (IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 2023) · cited 16× · AI/ML

**Wikidata**: [openalex:W4387490569](https://www.wikidata.org/wiki/openalex:W4387490569)  
**Source**: https://4ort.xyz/entity/l2o-ilt-learning-to-optimize-inverse-lithography-techniques